Based on the partial least squares (PLS) method, this article use the Total S&T Personnel, Total Funding for S&T Activities, Total Intramural Expenditures, Full-time Equivalent of R&D Personnel Total and the Total R&D Expenditure as the independent indicators to quantitatively analyze the impact on the high-tech industry development. The results showed that the Total S&T Personnel and Full-time Equivalent of R&D Personnel Total have more intense impact on high-tech industry development, while the total Intramural Expenditures is not obvious to the innovation output.